ROCKY MOUNTAIN SECTION OPTICAL SOCIETY OF AMERICA & IEEE LASERS AND ELECTROOPTICS SOCIETY March Meeting Date: Thursday, 20 Mar. 2003 Time: 7 PM refreshments, 7:30 PM talk Place: Engineering 100 Colorado State University, Fort Collins Title: Generation of Extreme Ultraviolet Radiation Using High Harmonic Generation Randy Bartels ECE, CSU Fort Collins, CO Abstract: Until recently, the generation of fully coherent beams has been limited to the visible/ultraviolet and longer wavelength regions of the spectrum. I will discuss the use of extreme nonlinear optics to generate laser beams in the extreme ultraviolet region of the spectrum. The extreme nonlinear optical process of high harmonic generation (HHG) is a useful way of generating coherent light throughout the ultraviolet and extreme ultraviolet (EUV) regions of the spectrum. In HHG, extremely short duration pulses can be produced by focusing a high intensity femtosecond laser pulse into a gas. Odd harmonics of the exciting laser are produced in a directed, narrow-divergence beam, with photon energies that can extend up to > 500eV (corresponding to harmonic orders > 300). This process thus coherently up-shifts a femtosecond pulse from the visible into the EUV region of the spectrum. However, experiments to date have shown that the HHG radiation is only partially spatially coherent, and does not retain the full coherence of the fundamental driving beam. In this talk, we show that EUV radiation generated by phase- matched HHG in a hollow core fiber has nearly perfect spatial coherence. Such an EUV source, with good beam quality and high spatial coherence, can be used for experiments in high- precision metrology, inspection of optical components for EUV lithography, and microscopy and holography with nanometer resolution. This source, with its short-wavelength and diffraction-limited output, represents the smallest inherent effective source-size of any light source yet created. I will discuss the measurement of the spatial coherence of phase- matched EUV light generated in a fiber using the process of high-harmonic generation. Coupled with previous measurements that demonstrate that coherent control techniques can be applied to obtain nearly-full temporal coherence from these sources, this means that fully spatially and temporally coherent laser-Iike beams of EUV light can now be generated. Furthermore, because HHG is generated using a table -top setup, this EUV source will be particularly useful for a variety of application including nanoscale probes and imaging, and for precision metrology of EUV optical components for the next generation of optical lithography. Imaging applications will also be discussed. Biography: Prof. Bartels received his B.S. in Electrical Engineering from Oklahoma State University in 1997. In January of 1996, Prof. Bartels was invited by Lawrence Livermore National Laboratory to work on the development of diode-pumped solid state lasers. He then went on to the University of Michigan, Ann Arbor, where he joined the research group of Professors Margaret Mumane and Henry Kapteyn and received both a GAANN Graduate Fellowship and a National Defense Science and Engineering Graduate Fellowship from the Department of Defense. During his tenure in the Kapteyn/Murnane group, they moved to JILA at the University of Colorado, Boulder where he performed his research for which he received a number of awards including the New Focus Student Research Award, the IEEE/LEOS Graduate Student Award, and the JILA Scientific Achievement Award. Prof. Bartels received his M.S. in 1999, and his Ph.D. in 2002, both in Electrical Engineering. Prof. Bartels joined the ECE Department at Colorado State University in January 2003.